Monday, May 22

CP7
Instabilities During Growth of Thin Films

5:45 PM-6:45 PM
Room: Independence B
Chair: Jack Thiesen, TAI, USA

5:45-6:00 A Model for Limiting Thickness in Low-Temperature Epitaxial Growth

Jack Thiesen, TAI, USA; and R. S. Crandall, NREL, USA

6:05-6:20 A Variational Approach for Computing Stress Driven Instabilities in Heteroepitaxial Crystalline Films

Eric Bonnetier, CNRS-CMAP Ecole Polytechnique, France; and Antonin Chambolle, CNRS-Ceremade Université de Paris-Dauphine, France

6:25-6:40 Implementation of the System of Experiment Design and Taboo Search into SiON Thin Film Technology

Igor A. Popov, Andre Van Calster, Johan De Baets, and Herbert De Pauw, ELIS-TFCG/IMEC, State University of Ghent, Belgium